Brand: KLA Tencor
The optical profilometer based on the stylus measurement technique, allows for a fast and direct scan, independent of the material properties. It features adjustable force and choice of stylus, which enables quantitative measurements of a wide variety of structures and materials.
Description
- Low force stylus profiler (Alpha-Step D-500) capable of 2D step measuring of height, roughness, bow and stress for organic and inorganic materials.
- Step height range from few nanometers to 1200µm.
- 140mm stage with high-resolution color camera controls.
Laboratory: Nanotechnology
Contact: Mariano Campoy (mcampoy@icmab.es)
