Mechanical Profilometer

Brand: KLA Tencor

The optical profilometer based on the stylus measurement technique, allows for a fast and direct scan, independent of the material properties. It features adjustable force and choice of stylus, which enables quantitative measurements of a wide variety of structures and materials.



  • Low force stylus profiler (Alpha-Step D-500) capable of 2D step measuring of height, roughness, bow and stress for organic and inorganic materials.
  • Step height range from few nanometers to 1200µm.
  • 140mm stage with high-resolution color camera controls.


Laboratory: Nanotechnology

Contact: Mariano Campoy (

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