Description
- Ultra-high vacuum system (Omicron) composed of Fast-entry-lock chamber and main chamber for MBE deposition on up to 10cm wafers.
- RHEED e-source (30 kV, Staib) and screen on lead glass.
Materials
- Si and Ge
- n and p-type dopant sources
Laboratory: MBE Lab
Responsible: Isabel Alonso (isabel@icmab.es)
