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Molecular Beam Epitaxy

Description

  • Ultra-high vacuum system (Omicron) composed of Fast-entry-lock chamber and main chamber for MBE deposition on up to 10cm wafers.
  • RHEED e-source (30 kV, Staib) and screen on lead glass.


Materials

  • Si and Ge
  • n and p-type dopant sources

Laboratory:  MBE Lab

Responsible: Isabel Alonso (isabel@icmab.es)